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| Wednesday, 8 April 2015, 16:30 HKT/SGT | |
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Source: ULVAC, Inc. | |
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Kanagawa, Japan, Apr 8, 2015 - (ACN Newswire) - ULVAC, Inc. (ULVAC) and Robert Bosch GmbH (Bosch) today announced they have signed a basic agreement to jointly develop piezoelectric device (PZT) for MEMS.
Bosch, as a world leading MEMS sensor manufacturer, selected ULVAC's SME-200 sputtering system for the development of upcoming leading edge MEMS. With the growth of MEMS technology, sensors and actuators that use piezoelectric device have been developed and commercialized in recent years. ULVAC believe that MEMS manufacturing technology, such as thin-film deposition and dry etching will be the key factor in producing high quality piezoelectric device in years to come.
Robert Bosch GmbH: www.bosch.com
Contact:
ULVAC, Inc.
Advanced Electronics Equipment Division
Yutaka Nishiyama
TEL: +81-467-89-2139
FAX: +81-467-89-2297
Topic: Business Tieup
Source: ULVAC, Inc.
Sectors: Electronics
http://www.acnnewswire.com
From the Asia Corporate News Network
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